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Pump the chamber down as far as practically possible, close the vacuum valve and measure the pressure rise over a period of time. Typically a rate of rise or leak rate is measured in a one (1) hour time period. If for example the pressure rises from 50 microns to 100 microns in one hour the rate of rise is 50 microns per hour. In other words you could say the leak rate is 50 microns per hour.