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Back migration in vacuum systems can be caused by several factors:
To prevent back migration, it is important to design vacuum systems with proper seals, gaskets, and valves to minimize leaks. Regular maintenance and monitoring of the system are also crucial to identify and address any potential sources of back migration. Techniques such as bake-out and degassing can be used to remove trapped gases from the system.
Source: https://www.lesker.com/newweb/vacuum_technology/vacuum_technology_handbook/vacuum_system_design.asp